HORIBA STEC Manuals & User Guides
HORIBA STEC specializes in precision fluid control components, including mass flow controllers and pressure regulators for the semiconductor manufacturing industry.
About HORIBA STEC manuals on Manuals.plus
HORIBA STEC is a leading global manufacturer of fluid control components and systems, operating as a key division of the HORIBA Group. The company is renowned for its high-precision Mass Flow Controllers (MFCs), liquid source vaporization systems, and automatic pressure regulators, which are critical in semiconductor and LCD manufacturing processes.
With a focus on accuracy, reliability, and advanced flow measurement technology, HORIBA STEC supports complex industrial applications requiring strict control of gases and liquids. Their product lineup includes the SEC and SECF series, widely utilized in vacuum and gas control systems worldwide.
HORIBA STEC manuals
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HORIBA SECF-Z554MGX, Z564MGX Mass Flow Controller/Meter Instruction Manual
Buka ea litaelo tsa HORIBA I031088400D Mass Flow Controller Meter
Tataiso ea Basebelisi ea Limithara tse Tšoaretsoeng ka Matsoho tsa HORIBA LAQUA 200 Series
HORIBA S070 Conductivity Sensor Litaelo
HORIBA 7544 DO Electrode Tip Instruction Manual
Bukana ea Taelo ea Laeborari ea HORIBA 9521-10D
HORIBA HC-200CA Calcium Ion Concentration Meter Manual
HORIBA LA-960V2 Measuring 2 le 2.5 μm Bukana ea Mosebelisi ea Maemo a PSL
HORIBA IHR Series Indasteri High Frequency Reader Bukana ea Tataiso
HORIBA STEC Auto Pressure Regulator UR-Z712/722/732 Instruction Manual
HORIBASTEC PE-D10 Monitor Unit Instruction Manual
PCU-2100 圧力/流量コントローラ 取扱説明書 - HORIBA STEC
HORIBA STEC SEC(F)-Z507MGX Mass Flow Controller Instruction Manual
HORIBA STEC SEC(F)-Z507KX(N) Mass Flow Controller Instruction Manual
HORIBA STEC Mass Flow Controller/Meter SEC(F)-Z534MGX(N) / Z544MGX(N) Instruction Manual
HORIBA STEC Mass Flow Controller/Meter SEC(F)-N136JM(R)/146JM(R) - Instruction Manual
HORIBA STEC SEC/SEF-E431X/E441X Mass Flow Controller and Meter User Manual
HORIBA STEC PV-A131 Piezo Valve Instruction Manual
Mass Flow Controller/Meter SEC(F)-Z531X(N) / Z541X(N) Instruction Manual
HORIBA STEC SEC(F)-N115MGM(R)/N125MGM(R) マスフローコントローラ/メータ 取扱説明書
HORIBA STEC SEC(F)-Z554MGX / Z564MGX Mass Flow Controller/Meter Instruction Manual
HORIBA STEC support FAQ
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What is the recommended warming-up time for HORIBA STEC mass flow controllers?
Generally, power should be supplied for at least 30 minutes without gas flowing to ensure the device reaches thermal stability and flow rate accuracy.
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What is the standard warranty period for HORIBA STEC products?
Products are typically warranted for one (1) year (parts and labor) from the date of shipment, covering defects not caused by customer neglect or improper operation.
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Can I install HORIBA STEC MFCs in any orientation?
Yes, many models such as the SEC(F) series cite 'Free' mounting orientation, largely without degradation of performance, though correct flow direction must be observed.
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How do I connect the electrical interface for the SECF-N135MGMR?
Depending on the model, connections are made via a D-subminiature 9-pin connector or specialized digital interface connectors (e.g., CC-Link, PROFIBUS). Refer to the specific pinout table in your instruction manual.
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What does it mean if the Status LED on my GR series regulator turns red?
A solid red Status LED typically indicates an error or irregular condition has occurred in the device. Check the manual for specific error codes or troubleshooting steps.